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CMFC-9000 Series Coriolis Flow Controllers

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
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The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.

Features:

  • High Accuracy - Controls flowrate to within ± 1.0% of set point; ideal for fluid blending and/or dispense applications
  • Fast Response 2 seconds (typically < 1 seconds for most applications)
  • Broad application range with 2 types of control valves
  • Wide range of flow control capability
  • All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
  • Mass flow measurement accuracy is independent of fluid density and viscosity

Designed and Assembled in California.

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.

Features:

  • High Accuracy - Controls flowrate to within ± 1.0% of set point; ideal for fluid blending and/or dispense applications
  • Fast Response 2 seconds (typically < 1 seconds for most applications)
  • Broad application range with 2 types of control valves
  • Wide range of flow control capability
  • All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
  • Mass flow measurement accuracy is independent of fluid density and viscosity

Designed and Assembled in California.

 

Flow Ranges:

Available from 25 grams per minute to 3000 grams per minute

End Connections:

1⁄4”, 3/8” in Pillar or Flare and other customs options

Input Signal (Set-point):

0-10 Vdc, 0-5 Vdc, 4-20mA

Output Signal:

0-10 Vdc, 0-5 Vdc, 4-20mA

Dimensions:

Please refer to the datasheet

For additional specification details, please refer to the product data sheet located in the documentation tab of this web page. 

  • Semiconductor CMP tools – suitable for use to precisely control the flow of chemi- cals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems.
  • Cleaning tools – for accurate and reliable control in the blending and delivering of cleaning chemistries on post CMP cleaning and related tools.
  • Copper plating tools – well suited to chemical mixing and dispense applications