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CMFC-9000 Series Coriolis Flow Controllers

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
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The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.

Features:

  • High Accuracy - Controls flowrate to within ± 1.0% of set point; ideal for fluid blending and/or dispense applications
  • Fast Response 2 seconds (typically < 1 seconds for most applications)
  • Broad application range with 2 types of control valves
  • Wide range of flow control capability
  • All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
  • Mass flow measurement accuracy is independent of fluid density and viscosity

This product is protected by U.S. and International patents. See Malema's list of patents for more information.

Designed and Assembled in California.

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.

Features:

  • High Accuracy - Controls flowrate to within ± 1.0% of set point; ideal for fluid blending and/or dispense applications
  • Fast Response 2 seconds (typically < 1 seconds for most applications)
  • Broad application range with 2 types of control valves
  • Wide range of flow control capability
  • All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
  • Mass flow measurement accuracy is independent of fluid density and viscosity

This product is protected by U.S. and International patents. See Malema's list of patents for more information.

Designed and Assembled in California.

 

Flow Ranges:

Available from 25 grams per minute to 3000 grams per minute

End Connections:

1⁄4”, 3/8” in Pillar or Flare and other customs options

Input Signal (Set-point):

0-10 Vdc, 0-5 Vdc, 4-20mA

Output Signal:

0-10 Vdc, 0-5 Vdc, 4-20mA

Dimensions:

Please refer to the datasheet

For additional specification details, please refer to the product data sheet located in the documentation tab of this web page. 

  • Semiconductor CMP tools – suitable for use to precisely control the flow of chemi- cals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems.
  • Cleaning tools – for accurate and reliable control in the blending and delivering of cleaning chemistries on post CMP cleaning and related tools.
  • Copper plating tools – well suited to chemical mixing and dispense applications