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M-1500P Ultrasonic Flow Meter

The M-1500P, a non - invasive inline ultrasonic flow meter uses state of the art signal converter with DSP technology and PFA wetted parts that are contamination free from ions or particles. They are ideally suited for semiconductor fluid flow measurement and other applications that demand high purity wetted parts and precise measurement.
Industries: Industrial , Semiconductor
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The M-1500P Series with DSP Technology consists of an inline primary flow sensor and externally mounted controller unit. The flow sensor is a straight - through flow tube that uses ultrasonic sensing technology to measure the flow rate. The Controller Electronics receives the raw flow rate signal from the sensor and provides flow rate information in terms of analog and pulse output signals. (Both the LCD display and output signals are user-scalable).

Features:

The M-1500 Plus utilizes the latest digital signal processing (DSP) technology and features significant reduction of adverse influence of bubbles in measured fluids which is a common problem in semiconductor and chemical processes. Normally, ultrasonic flowmeters have difficulty in measuring fluid containing bubbles. This is because the bubbles interfere with ultrasonic signal passage. With our DSP technology and accumulated field experience, the measurement accuracy of fluids with bubbles capability has been remarkably improved.

The M-1500P Series with DSP Technology consists of an inline primary flow sensor and externally mounted controller unit. The flow sensor is a straight - through flow tube that uses ultrasonic sensing technology to measure the flow rate. The Controller Electronics receives the raw flow rate signal from the sensor and provides flow rate information in terms of analog and pulse output signals. (Both the LCD display and output signals are user-scalable).

Features:

The M-1500 Plus utilizes the latest digital signal processing (DSP) technology and features significant reduction of adverse influence of bubbles in measured fluids which is a common problem in semiconductor and chemical processes. Normally, ultrasonic flowmeters have difficulty in measuring fluid containing bubbles. This is because the bubbles interfere with ultrasonic signal passage. With our DSP technology and accumulated field experience, the measurement accuracy of fluids with bubbles capability has been remarkably improved.

Performance Specifications

Flow Range*

4 to 600 mL/min

Accuracy**

± 2% R.D. for flow rates over 50 mL/min

± 1 mL/min for flow rates under 50 mL/min

Repeatability

± 0.5%

* Please contact the factory for special flow ranges

** Special calibration is available upon request

 

Sensor Material Specifications

Enclosure Classifications

IP56 / NEMA 4X

Cable Material

PTFE jacketed cabling

Cable Length

2 meters (standard)

Non-wetted Parts

FEP, Peek, PP, PTFE, PVDF, Viton A

Wetted Parts

High Purity PFA

 

Functional Specifications

Analog Output Current Isolated 4 - 20 mA < (Maximum load resistance of 500 Ω) current output
Voltage 0 to 10 VDC
Pulse Output Isolated Open Collector (15 VDC, 15 mA)
Frequency of 1 kHz at 100% of full scale
Low Flow Cut-off User settable
Power Supply 12 - 36 VDC
Power Consumption 5 W continous (1.5 A on start-up)
Ambient Temperature 32 - 115 °F (0 - 46 °C)
Fluid Temperature 50 - 140 °F (10 - 60 °C)
Maximum Operating Pressure 70 psig

 

For additional specification details, please refer to the product data sheet located in the documentation tab of this web page. 

  • Semiconductor chemistries and slurries
  • Chemical dispense applications
  • Bio-pharm liquid flow measurement and dispense applciaitons