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Fluid material handling in the semiconductor industry requires processes that are accurate and repeatable, while maintaining the highest standards for purity and cleanliness. Reliability, quality, and productivity improvements improve throughput and give chipmakers an advantage in this highly competitive market. Malema’s high-purity solutions are engineered to improve process control through use of leading edge technologies.

Experienced in sensors, electronics, and process instrumentation, Malema incorporates groundbreaking state of the art technologies into every instrument.

 

LFC-7000 Series Ultrasonic Liquid Flow Controllers

The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.
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CMFC-9000 Series Coriolis Flow Controllers

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
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M-2111 Ultrasonic Flow Meter

The M-2111 Series flow detector has non-contact transducers and a PFA flow tube design without dead pockets. Its advanced signal converter with DSP electronics offers unmatched flow measurement capabilities even in tough applications. The M-2111 is an ideal choice for use in the semiconductor industry where extreme cleanliness and anti-corrosiveness are required.
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CPFM-8800 Series Coriolis Mass Flow Meters

The CPFM-8800 Series is a family of advanced Coriolis flow meters fabricated exclusively from PFA polymeric material for measuring liquids in high-purity semiconductor, biopharm and other applications that require all-PFA wetted surfaces and provide a Mass Flow Rate, Total Mass and Temperature output with accuracy ±1% of reading.
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MFC-8100 Series Closed-Loop Flow Controller

Closed Loop Integrated Flow Controller - Single Display Version.
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KL-92 Series Pressure Transducers

Pressure Transducer for all Chemistries The KL-92 is a pressure transducer suitable for use in monitoring pressure of various high-purity and corrosive/ aggressive fluids. The superior design provides for minimal “dead volume” which reduces the potential for contamination of the measured fluid / process. The KL-92 is available in two construction types: inline or insertion. The body construction meets IP-54 requirements.
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KL-95 Series Pressure Transducers with display

“Flow Through” Pressure Transducer w/ Onboard Display The KL95 is a “flow through” pressure transducer suitable for use in monitoring pressure of various high-purity and corrosive/aggressive fluids. The “flow through” design provides for minimal “dead volume” which reduces the potential for contamination of the measured fluid/process. The KL95 is provided with an integrally mounted local LED display and is available in two standard pressure ranges.
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M-100 Series Adjustable Flow Switches

Adjustable flow switch with right-angle flow.
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